Pico

Laboratory & Small Series System

Pico
Approx. 5 liter chamber volume

Pico plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Pico plasma systems.


Application

Pico is used in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles

  • Different Type of Pico Plasma System

    Pico Plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation Pico plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation Pico plasma system for process development, cleaning, activation, etching in small batches

    Pico plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation Pico Plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation Pico plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation


    Specifications

    Basic equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 4 – 15 litres, depending on the version
    • Power supply: 230 V for table top systems, 400 V/3-phase for stand-alone systems
    Gas supply
    • Needle valve
    • Mass Flow Controllers (MFCs)
    Vacuum chambers
    • Stainless steel, round, with lid
      (approx. ∅ 150 mm, L 320 mm or L 600 mm)
    • Stainless steel, rectangular, with hinged door
      (approx. W 160 x H 160 x D 325 or 600mm)
    • Aluminium, round, with lid or hinged door
      (approx. ∅ 130 mm, L 300 mm or L 600 mm)
    • Quartz glass (UHP), round, with lid or hinged door
      (approx. ∅ 130 mm, L 300 mm or L 600 mm)
    • Borosilicate glass (UHP), round, with lid
      (approx. ∅130 mm, L 300 mm or L 600 mm)
    Load
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multiple levels
    • RIE
    Control
    • Semi-automatic
    • PCCE control (Microsoft Windows CE)
    • PC control (Microsoft Windows POS Ready 2009)
    Pressure measurement
    • Pirani
    • Baratron (for corrosive gas version)
    Timer
    • Digital
    Generators
    • Frequencies:
      40 kHz: Power 0 – 200 W; 0 -1000 W
      13.56 MHz: Power 0 – 50 W; 0 – 100 W; 0 – 300 W
      2.45 GHz: Power 0 – 300 W

      All generators are continuously adjustable from 0 – 100 %

    Vacuum pumps
    • In different sizes and from various manufacturers (as required with activated carbon filter)


    Please do not hesitate to drop us an email at voltrium@voltrium.com.sg or simply call us at +65 6694 6278 for more assistance.

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