Tetra 100

Production Systems

Tetra-100
Approx. 100 liter chamber volume

Tetra 100 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 100 plasma systems. Tetra 100 plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Biotechnology
  • Elastomer technology
  • Electronics
  • Electron microscopy
  • Precision technology
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Solar technology
  • Textiles

  • Video


    Specifications

    Basic equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 80 – 100 litres, depending on the version
    • Power supply: 230 V or 400 V/3-phase
    Gas supply
    • Mass Flow Controllers (MFCs)
    Vacuum chambers
    • Stainless steel, round, hinged door
      (approx. ∅ 400 mm, L 625 mm)
    • Stainless steel, rectangular, hinged door
      (approx. W 400 x H 400 mm D 625 mm)
    Load
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multiple levels
    • RIE electrodes with gas shower
    Control
    • PCCE control (Microsoft Windows CE)
    • PC control (Microsoft Windows POS Ready 2009)
    Pressure measurement
    • Pirani
    • Baratron (for corrosive gas version)
    Timer
    • Digital
    Generators
    • Frequencies:
      40 kHz: Power 0 – 1000 W; 0 – 1500 W; 0 – 2500 W
      13.56 MHz: Power 0 – 300 W; 0 – 600 W; 0 – 1000 W
      2.45 GHz: Power 0 – 1200 W

      All generators are continuously adjustable from 0 – 100 %

    Vacuum pumps
    • In different sizes and from various manufacturers (as required with activated carbon filter)


    Please do not hesitate to drop us an email at voltrium@voltrium.com.sg or simply call us at +65 6694 6278 for more assistance.

    Copyright © 2012 Voltrium Systems Pte Ltd. All Rights Reserved.