Planar-TM

Planar-TM factory was established in 1968, nowadays it is the headquarters enterprise of Planar Concern and the largest manufacturer of equipment for semiconductor and electronic industry in CIS.

Production space – 51,420 m2 including clean room Class 1000 - 400 m2 and Class 100 – 120 m2. Number of employees - 1200.

Traditionally, the primary products are:

• Photolithography equipment ;
• Inspection and measurement equipment;
• Assembly equipment;
• Microscopes, high-resolution lenses, optical components and systems, medical equipment;
• Moulds, linear step motors, sensors, precision parts of granite and alloys.

Planar-TM possesses the following production facilities:

Optical Manufacturing Facilities

Due to the special equipment the following types of components are manufactured at the optical facility:

• parallel-sided parts up to 1000 mm with accuracy λ/20;
• prisms with angle tolerance ± 0.5 sec;
• spherical components up to 300 mm in diameter with accuracy λ/20;
• aspherical lenses;
• bend reflectors up to 300 mm in diameter.

The optical facilities are mainly equipped with European and U.S. equipment. Equipment from Loh, Dama, Spindler Und Houer, Karl (about 50 units) is used for optical components processing; Leybold equipment (12 units) is used for manufacturing optical coatings and inspection/measurement equipment from Möller und Wedel, Zygo, Perkin Elmer (more than 20 units).

For the assembly of precision optical systems, assembly and adjustment of high-resolution objectives the optical facilities are equipped with a unique, specialized equipment designed and developed by Planar Concern using a number of inventions and know how and made by Planar-TM:

• System for centering of precision parts and objective elements by diamond turning (Model SO-001AM) with accuracy of relative position of lens surfaces and lens mounts better than 0.2 μm;
• System for assembly and adjustment of high resolution projection objectives (Model MN-241) which incorporates high-precision aerostatic parts and photoelectric measurement systems enabling assembly accuracy better than 0.2 μm;
• Lens resolution inspection system Model EM-6089;
• Optical elements thickness measurement system (Model KU-223) with measurement accuracy 0.2 μm;
• Coordinate measurement system (Model EM–6009-2) which enables measurement of coordinates of marks as well as lines/spaces with accuracy of 0.2 μm.

Metalworking Facilities

The metalworking facilities provide for a wide range of technological capabilities for processing precision parts and complex basic parts due to the availability of such equipment as machining centers from Toshiba, Mazak and M.Seike; universal milling and boring machines from Maho and Micron; grinding machines from Overbek, Shipman, Elb Shliff; coordinate boring and coordinate grinding machines from Hauser and M.Seike; circular grinding machines from Studer as well as equipment of the best Belarusian and Russian companies.

Processing and inspection of precision parts is conducted in environment-controlled rooms with the temperature of 22±1.5°С. Frame welding and blank productions are available as well. Manufacturing of granite parts: plates up to 3000x1600x360 mm, guides, traverses up to 1600 mm with accuracy 1.5-5 μm, complex shape parts with holes and grooves. For this purpose equipment of the following companies is used: Gregory, Fickert Winterling, Elb Shliff, Waldrich Coburg, and Wyler. Quality control of blanks and ready-made parts is carried out by the method of nondestructive inspection.

Assembly Facilities

The assembly production provides for the manufacturing processes from assembly of printed circuit boards, wiring works, assembly of mechanical units and adjustment of equipment up to acceptance and periodical tests of manufactured goods. Clean rooms Class 100 and Class 1000 equipped with special adjustment and certification stands are used for the adjustment and testing of manufactured products. Rooms for testing equipment under higher temperatures, thermo cycling chambers, vibration and strike tests chambers are available as well.

Linear Step Motor Manufacturing Facility

The linear step motors (LSMs) designed and produced by our company are used in precision machine building (in semiconductor industry in particular) and are designed for angular and linear motions in coordinate and transport systems enabling high accuracy and dynamics. Mechanically, LSMs on air bearings as well as on frictionless bearings are available depending on customer requirements. Our machinery ensures precision processing of parts and highly accurate cutting of tooth structures on LSM forcers and platens in the range of 0.005 to 0.01 mm depending on platen size which can exceed 1.5 m. In coordinate systems the LSMs can be used with feedback sensors providing motion accuracy of 0.1 – 0.05 microns or in open-loop mode providing accuracy up to 10 microns.

Tool Making Facilities

The factory produces plastic injection molds, transfer molds for aluminum alloys, stamps, punches, different devices and special cutting tools for the metal-working facilities of the factory.

The tool-making facilities are equipped with more than 55 units of processing and measurement equipment, including:

• Spark-erosion broaching machine Agie Model Mondo Star-50 and Japax Model LS-500X;
• Spark-erosion wiring machines Agie and Japax;
• coordinate-grinding and jig-boring equipment Hauser;
• Coordinate milling machines Mikron and Maho.

The tool-making production uses cooperation with other departments of the factory in chemical and thermal treatment of parts, in processing of large parts, precision measurements and galvanic operations. Molds are tested on Battenfeld thermoplastic system Model 800/315 CDC. Computer design of the molds and stamps is done using ProEngineer, SolidWorks or AutoCAD.

Planar-TM Factory of Planar Concern

Address:
2 Partizansky Ave
Minsk 220763
Republic of Belarus