[ PLASMA SYSTEM ZEPTO - LOW COST PLASMA CLEANER]
2,6
litres laboratory low cost plasma system
ZEPTO with semi-automatic control.
Technical Data:
Plasma cleaner Zepto
switchgear cabinet :
W 425 mm, H 185 mm, D 450 mm
chamber:
glass, Ø 105 mm, L 300 mm
chamber volume:
approx. 2,6 litres
gas supply:
2 gas supplies through needle valve
generator:
40kHz/100W or 13.56 MHz/50W fixed matching
vacuum pump:
suction power: 2 m³/h
tray:
1 pc. tray
control:
manual, process time by analog timer
[ PLASMA SYSTEM ATTO - LOW COST PLASMA CLEANER]
10,5 litres laboratory low cost plasma
system ATTO with semi-automatic control.
Technical Data:
Plasma cleaner Atto
switchgear cabinet:
W 425 mm, H 275 mm, D 450 mm
chamber:
glass, Ø 211 mm, L 300 mm
chamber volume:
approx. 10,5 litres
gas supply: 2 gas channels through needle valve
generator:
40kHz/200W or 13.56 MHz/50W fixed matching
vacuum pump:
suction power: 2m³/h
tray:
1 pc. tray
control:
manual, process time by timer
[ PLASMA SYSTEM FEMTO Ver7 - PLASMA CLEANER ]
2
litres laboratory plasma system FEMTO with semi-automatic control.
Technical Data:
Plasma cleaner Femto
(version 7)
switchgear cabinet:
W 320 mm, H 500 mm, D 420 mm
chamber:W 100 mm, H 270 mm, D 280 mm
chamber volume:
approx. 2 litre
gas supply:
2 gas channel through needle valve
generator:
40kHz/100 W, infinitely variable
vacuum pump:
Leybold, Type S1.5 (1.5m³/h)
tray:
1 pc. tray
control: semi-automatic control, process time
by time or automatic
Pressure sensor:
Pirani
[ PLASMA SYSTEM PICO - PLASMA
CLEANER ]
Technical Data:
Plasma cleaner PICO
switchgear cabinet:
W 550 mm, H 330 mm, D 500 mm
chamber:
Ø 150 mm, L 320 mm
chamber volume:
approx. 5 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/200 W, infinitely variable
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type Trivac D2.5B (2.5 m³/h) trays:
1 pc. tray
control:
semi-automatic control, process time by timer
[ PLASMA SYSTEM NANO - PLASMA CLEANER ]
Technical Data:
Plasma cleaner NANO
switchgear cabinet:
W 580 mm, H 650 mm, D 500 mm
chamber:
Ø 267 mm, L 420 mm
chamber volume:
approx. 24 litres
gas supply:
two gas channels through needle valve
generator:
40kHz/300 W, infinitely variable
(optional: 13.56 MHz or 2.45 GHz)
vakuum pump:
Leybold, Type D8B (8 m³/h)
trays:
1 pc. tray
control:
semi-automatic, process time by timer
[ PLASMA SYSTEM TETRA-30-LF - PLASMA CLEANER ]
Technical Data:
Plasma cleaner TETRA-30-LF
switchgear cabinet:
W 600 mm, H 1100 mm, D 650 mm
chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
chamber volume:
approx. 34 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-1000 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D16B (16 m³/h)
trays:
up to 6 trays
(optional: rotary drum)
control:
fully automatic control, process time by timer
[ PLASMA SYSTEM TETRA-100-LF - PLASMA CLEANER ]
Technical Data:
Plasma cleaner TETRA-100-LF
switchgear cabinet:
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 400 mm, D 625 mm, H 625 mm
chamber volume:
approx. 100 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D40B (40 m³/h)
trays:
up to 10 trays
(optional: rotary drum)
control:
PC control (Windows)
[ PLASMA SYSTEM TETRA-150-LF - PLASMA CLEANER ]
Technical Data:
Plasma cleaner TETRA-150-LF
switchgear cabinet:
W 1000 mm, H 2.100 mm, D 1000 mm
chamber:
W 400 mm, D 625 mm, H 600 mm
chamber volume:
approx. 100 litres
gas supply:
2 gas channels through needle valve
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D65B (65 m³/h)
trays:
up to 16 trays
(optional: rotary drum)
control:
PC control (Windows)
[ Electron Microscopy]
PLASMA SYSTEM FEMTO UHP - PLASMA CLEANER:
1. switchgear cabinet
W 345 mm x H 220 mm x D 420 mm
2. chamber
Ø: 80 mm, L: 270 mm
materials: quartz or borosilicate glass
chambervolume: approx. 2 litre
3. gas supply
one gas channel through needle valve
4. generator
40 KHz / 100 W infinitely variable
or
13,56 MHz / 100 W infinitely variable
5. electrode
outside of the glass chamber
capacitive linking
6. control
semi-automatic,
process time by timer
7. connections
gas: 6mm Swagelok
power supply: 220-240V /
16 A 50-60 Hz
8. vacuum pump
rotary vane pump
pumping speed: 1,5 m3/h
the pump can run with O2
[ ATMOSPHERIC PLASMA ]
Technical Data
Plasma cleaner PlasmaBeam
1. Supply Unit:
(Desktop version)
W 562 mm, H 211 mm, D 420 mm
Weight: approx. 20 kg
(19" rack version)
W 420 mm, H 140 mm, D 580 mm
Weight: approx. 20 kg
2. Plasma Applicator:
Max. Ø 32 mm, L 270 mm
Weight: approx. 0,6 kg
Length of cable: 3 m
(Special lengths on request)
Width of treatment: max. 12 mm
3. Generator:
Frequency: 20 kHz
Power: approx. 300 W
4. Connections:
Process and cooling gases:
Dry, oil-free compressed air
Input pressure: 5,5-8 bar
Gas flow: approx. 2 m3/h
Power supply: 230 V/6 A / 50-60 Hz
5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma
OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply
unit.
[ RF-GENERATORS - 13.56 MHz - 300 watts]
RF generator 13.56 MHz, 300 W
* Rated RF power output: 300 Watts
* Frequency: 13.560 MHz ± 100ppm
* Adjustable RF power range :
0 - 300 Watts, continous
* Generator can be pulsed:
Min. on-time: 5µs
* Impedance: 50 Ohms
* RF stability: less than 5 %
(depends on the adjusting device)
* Load missmatch protection (built-in) against open output and short circuit
* Regulation tolerance load:
VSWR = 1.2
* Capable of switching power to 100 % immediately
* Mains input : 88 - 264 VAC / 47 - 63 Hz (when combined with external power
supply )
* Mains power consumption:
max. 580 Watts
* Remote interface connector intended
for :
- RF switch ON/OFF
- RF power adjustment
(0...10V = 0...100%)
* RF output: N connector
* Power connector : for external
power supply
* Weight: approx. 18 kg (generator)
* 19-inch rack |
