Low-pressure plasma offers very versatile options to modify surfaces. Precision cleaning of contaminated components, the plasma activation of plastic parts, etching of PTFE, silicon and coating of plastic parts with PTFE-like films are among the applications. In this respect, low-pressure plasma is used in many different areas where it is important to bond materials together, or to change the surface properties to suit your needs.

In the low-pressure plasma technology, gas is excited in a vacuum by supplying energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.

There are three plasma effects:

Micro-sandblasting: The surface is removed by the ion bombardment
Chemical reaction: Chemical reaction of the ionized gas with the surface
UV radiation: UV radiation breaks down long-chain carbon compounds

Cleaning	Activating	Etching	Coating
Ion bombardment cleans surfaces physically (sputtering) and, depending on the gas, also chemically. The contamination is vaporized and sucked away.	Plasma treatment of a plastic surface with eg. oxygen, radicals are being formed which lead to a good adhesion of finish and glue.	Etching of the surface with a reactive process gas, material is removed, vaporized and sucked off. Therefore the surface area is enlarged.	A monomer gas is introduced to the plasma chamber, because of plasmapolymerization, layers will be deposited on the surface.

The effect of the plasma changes by varying the process parameters such as pressure, power, process time, gas flow and composition. Several effects can therefore be achieved in a single process step.

Products

Laboratory & Small Series System


Zepto Approx. 2,6 litre chamber volume	Atto Approx. 10 litre chamber volume	Femto Approx. 2 litre chamber volume


Pico Approx. 5 litre chamber volume	Nano Approx. 24 litre chamber volume

Production Systems


Tetra-30 Approx. 34 litre chamber volume	Tetra-100 Approx. 100 litre chamber volume	Tetra-150 Approx. 150 litre chamber volume


Tetra 2800 Approx. 2800 litre chamber volume

Large and Special Systems
in intermediate sizes/ special sizes can be produced on request.

The systems follow the conceptual point of views:
• Expected output and yield
• Size of parts to be treated

Eg. Tetra-600-LF-PC
The production system TETRA-600 with 600 litres chamber volume and PC control is
mainly used for serial production (cleaning, etching and activation).


Plasma system Tetra-600-LF-PC (opened)	Plasma system TETRA-600-LF-PC (closed)	Plasma system TETRA-600-LF-PC with rotary drum (closed)	Plasma system TETRA-600-LF-PC with rotary drum (opened)

Eg. Tetra-12.600-LF-PC
The production system Tetra-12.600 with 12.600 litres chamber volume
and PC-control is mainly used for serial production (cleaning and activation).


Plasma system TETRA-12600-LF-PC (opened)	Filling plasma system with roll car	Plasma system TETRA-12600-LF-PC (closed)	Plasma in TETRA-12600-LF-PC (plastics on activation)