Low-pressure plasma a wide range of options for surface modification, for example fine-cleaning of contaminated components, plasma activation of plastic parts, etching of PTFE or silicon, and coating of plastic parts with PTFE-like layers. This means that low-pressure plasma is used in a great variety of industries when it comes to combining materials or changing the surface characteristics in a directly targeted manner.

In the low-pressure plasma technology, gas is excited in a vacuum by supplying energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.

There are three plasma effects:

Micro-sandblasting: The surface is removed by the ion bombardment
Chemical reaction: Chemical reaction of the ionized gas with the surface
UV radiation: UV radiation breaks down long-chain carbon compounds

Plasma Processes

Materials Cleaning	Activation of Materials	Etching Materials	Coating of Materials
Ion bombardment cleans surfaces physically (sputtering) and, depending on the gas, also chemically. The contamination is vaporized and sucked away.	Plasma treatment of a plastic surface with eg. oxygen, radicals are being formed which lead to a good adhesion of finish and glue.	Etching of the surface with a reactive process gas, material is removed, vaporized and sucked off. Therefore the surface area is enlarged.	A monomer gas is introduced to the plasma chamber, because of plasmapolymerization, layers will be deposited on the surface.

Products

Laboratory & Small Series System


Zepto One Approx. 1.7 litre chamber volume	Zepto Approx. 2.6 litre chamber volume	Atto Approx. 10 litre chamber volume


Femto Approx. 2 litre chamber volume	Pico Approx. 5 litre chamber volume	Nano Approx. 24 litre chamber volume


Tetra-30 Approx. 34 litre chamber volume	Tetra 45 Approx. 45 litre chamber volume	Tetra-100 Approx. 100 litre chamber volume


Tetra-150 Approx. 150 litre chamber volume	Tetra 320R Approx. 320 litre chamber volume	Tetra 2800 Approx. 2800 litre chamber volume


Tetra 120 Rotary Drum Approx. 120 litre chamber volume	Tetra 300 Pulveranlage Approx. 300 litre chamber volume