Low Pressure Plasma

Low-pressure plasma a wide range of options for surface modification, for example fine-cleaning of contaminated components, plasma activation of plastic parts, etching of PTFE or silicon, and coating of plastic parts with PTFE-like layers. This means that low-pressure plasma is used in a great variety of industries when it comes to combining materials or changing the surface characteristics in a directly targeted manner.

In the low-pressure plasma technology, gas is excited in a vacuum by supplying energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.

There are three plasma effects:

  1. Micro-sandblasting: The surface is removed by the ion bombardment
  2. Chemical reaction: Chemical reaction of the ionized gas with the surface
  3. UV radiation: UV radiation breaks down long-chain carbon compounds

Plasma Processes

Materials Cleaning Activation of Materials Etching Materials Coating of Materials


Ion bombardment cleans surfaces physically (sputtering) and, depending on the gas, also chemically. The contamination is vaporized and sucked away.


Plasma treatment of a plastic surface with eg. oxygen, radicals are being formed which lead to a good adhesion of finish and glue.


Etching of the surface with a reactive process gas, material is removed, vaporized and sucked off. Therefore the surface area is enlarged.


A monomer gas is introduced to the plasma chamber, because of plasmapolymerization, layers will be deposited on the surface.

Products

Laboratory & Small Series System

Zepto One
Zepto
Atto
Zepto One
Approx. 1.7 litre chamber volume
Zepto
Approx. 2.6 litre chamber volume
Atto
Approx. 10 litre chamber volume

Femto
Pico
Nano
Femto
Approx. 2 litre chamber volume
Pico
Approx. 5 litre chamber volume
Nano
Approx. 24 litre chamber volume
Tetra 30
Tetra 45
Tetra 100
Tetra-30
Approx. 34 litre chamber volume
Tetra 45
Approx. 45 litre chamber volume
Tetra-100
Approx. 100 litre chamber volume

Tetra 150
Tetra 320R
Tetra 2800
Tetra-150
Approx. 150 litre chamber volume
Tetra 320R
Approx. 320 litre chamber volume
Tetra 2800
Approx. 2800 litre chamber volume

Tetra 120 Rotary Drum
Tetra 300 Pulveranlage
Tetra 120 Rotary Drum
Approx. 120 litre chamber volume
Tetra 300 Pulveranlage
Approx. 300 litre chamber volume