Femto

Laboratory & Small Series System

Femto

Femto
Approx. 2 litre chamber volume

Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems.

Application

 Femto is used in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles
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    Different Type of Femto Plasma System
    Femto plasma system for process development, Plasma cleaner, Plasma asher, Plasma etcher, Plasma activation, Femtoscience Femto plasma system with door hinges for process development, cleaning, activation, etching in small batches Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation

    Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation Femto plasma system for process development, cleaning, activation, etching in small batches Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation, Femtoscience

    Specifications

    Basic equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 1.9 – 6 litres, depending on the version
    • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
    Gas supply
    • Needle valve
    • Mass Flow Controllers (MFCs)
    Vacuum chambers
    • Stainless steel, round with lid
      (approx. ∅ 100 mm, L 278 mm or L 600 mm)
    • Stainless steel, rectangular, hinged door
      (approx. W 103 x D 285 x H 103)
    • Aluminium, round, with lid or hinged door
      (approx. ∅ 95 mm, L 280 mm or L 600 mm)
    • Quartz glass (UHP), round, with lid or hinged door
      (approx. ∅ 95 mm, L 280 mm or L 600 mm)
    • Borosilicate glass (UHP), round, with lid or hinged door
      (approx. ∅ 95 mm, L 280 mm or L 600 mm)
    Load
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multiple levels
    • RIE
    Control
    • Semi-automatic
    • PCCE control (Microsoft Windows CE)
    • PC control (Microsoft Windows POS Ready 2009)
    Pressure measurement
    • Pirani
    • Baratron (for corrosive gas version)
    Timer
    • Digital
    Generators
    • Frequencies:
      40 kHz: Power 0 – 100 W; 0 – 1000 W
      13.56 MHz; Power 0 – 50 W; 0 – 300 W
      12.45 GHz: Power 0 – 100 W; 0 – 300 W

      All generators are continuously adjustable from 0 – 100%
    Vacuum pumps
    • In different sizes and from various manufacturers (as required with activated carbon filter)