Nano

Nano
Approx. 24 liter chamber volume

Nano plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Nano plasma systems.

• The housing size varies depending on the components/options
• Chamber volumes: 18 – 36 litres, depending on the version
• Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

• Needle valve
• Mass Flow Controllers (MFCs)

• Stainless steel, round, with lid
  (approx. ∅ 267 mm, L 420 mm or L 600 mm)
• Stainless steel, rectangular, hinged door
  (approx. W 240 mm x D 420 mm or 600 mm)
• Aluminium, round, with lid or hinged door
  (approx. ∅ 240 mm, L 400 mm or L 600 mm)
• Quartz glass (UHP), round, with lid or hinged door
  (approx. ∅ 240 mm, L 400 mm or L 600 mm)
• Borosilicate glass (UHP), round, with lid or hinged door
  (approx.∅ 240 mm, L 400 mm or L 600 mm)

• Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

• Single, or multiple levels
• RIE

• Semi-automatic
• PCCE control (Microsoft Windows CE)
• PC control (Microsoft Windows POS Ready 2009)

• Pirani
• Baratron (for corrosive gas version)

• Digital

• Frequencies:
  40 kHz: Power 0 – 300 W; 0 – 1000 W
  13.56 MHz: Power 0 – 100 W; 0 – 300 W
  2.45 GHz: Power 0 – 600 W;

  All generators are continuously adjustable from 0 – 100 %

• In different sizes and from various manufacturers (as required with activated carbon filter)