The production system Tetra 2800 LF-PC with its 2800-litre chamber volume and PC control is mainly used in series production (cleaning, etching and activation)
Specifications
Switch cabinet
W 600 mm, H 1700 mm, D 800 mm
Gas supply
3 gas channels via MFCs
Chambers
∅ 1200 mm, D 2500 mm
Chamber volume
approx. 2800 litres
Generators
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
