Tetra 30

Tetra 30
Approx. 34 liter chamber volume

Tetra 30 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 30 plasma systems. Tetra 30 plasma systems are used primarily in the following areas:

• The housing size varies depending on the components/options
• Chamber volumes: 34 – 57 litres, depending on the version
• Power supply: 230 V or 400 V/3-phase

• Mass Flow Controllers (MFCs)

• Stainless steel, rectangular, hinged door
  (approx. W 305 mm x D 370 mm or 625 mm)

• Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

• Single, or multiple levels
• RIE electrodes with gas shower

• PCCE control (Microsoft Windows CE)
• PC control (Microsoft Windows POS Ready 2009)

• Pirani
• Baratron (for corrosive gas version)

• Digital

• Frequencies:
  40 kHz: Power 0 – 1000 W; 0 – 1500 W; 0 – 2500 W
  13.56 MHz: Power 0 – 300 W; 0 – 600 W
  2.45 GHz: Power 0 – 600 W; 0 – 1200 W

  All generators are continuously adjustable from 0 – 100 %

• In different sizes and from various manufacturers (as required with activated carbon filter)