Low-Pressure Plasma Systems
The Tetra 320R production system with its chamber volume of 320 litres and PC control is used in series production (cleaning, etching and activation).
| Specifications | |
|---|---|
| Dimensions | 870 mm x 1860 mm x 1400 mm (W x H x D) |
| Vacuum Chamber |
Aluminium, round, hinged door Ø 640 mm, D 1000 mm Depths of max. 3 m possible |
| Chamber Volume | Approx. 320 litres |
| Gas Supply | Mass flow controller (MFC) |
| Generator Frequency | 80 kHz / 0 – 3000 W |
| Electrodes |
One- or multi-tier RIE electrode with gas shower |
| Controls | PC control (Microsoft Windows 10 IoT) |
| Power Supply | 400 V / 50 – 60 Hz, 3 phases |
| Pressure Measurement |
Pirani Capacity pressure gauge |
| Vacuum Pump | In different sizes and from different manufacturers (if required with activated carbon filter) |