Low-Pressure Plasma Systems
The Tetra 45 plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Tetra 45 plasma systems.
The chamber with 125 mm height and 572 mm width is particularly suitable for large-sized components. Since the chamber is made from aluminium extruded sections, the length can be flexibly adjusted.
| Specifications | |
|---|---|
| Dimensions |
870 mm x 1700 mm x 1000 mm (W 1000 mm incl. connector) (W x H x D) |
| Vacuum Chamber |
Aluminium rectangular with door W 572 mm x H 125 mm x D 650 mm Aluminium rectangular with drawer |
| Chamber Volume | Approx. 45 litres |
| Gas Supply | Mass flow controller (MFC) |
| Generator Frequency |
80 kHz / 0 – 1000 W; 0- 3000 W 100 kHz / 0 – 500 W 13.56 MHz / 0 – 300 W 2.45 GHz / 0 – 850 W |
| Electrodes |
One- or multi-tier RIE electrode with gas shower |
| Controls | Basic PC control (Windows CE) Full PC control (Windows 10 IoT) |
| Power Supply | 400 V / 50 – 60 Hz |
| Pressure Measurement |
Pirani Capacity pressure gauge |
| Vacuum Pump | In different sizes and from different manufacturers (if required with activated carbon filter) |
| Applications |
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