Zepto One

Low-Pressure Plasma Systems (Plasma Cleaner)

Zepto One

The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:

Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology

Dimensions 425 mm x 185 mm x 450 mm (W x H x D)
Vacuum Chamber Silica glass (UHP)*
Ø 105 mm, depth 300 mm

W6 silica glass (UHP)*
Ø 160 mm, depth 180 mm

Borosilicate glass (HP)*
Ø 105 mm, depth 200 mm

W6 borosilicate glass (HP)*
Ø 160 mm, depth 180 mm

RIE – Aluminium bell round with lid
Ø 190 mm, depth 60 mm

Rectangular chamber – lime-natron-glass
135 mm x 120 mm x 65 mm (WxHxD)

*round with lid (opt. hinged door)

Chamber Volume Approx. 1 – 4 litres
Gas Supply Needle valves
Mass flow controllers (MFCs)
Generator Frequency 40 kHz power 0 – 100 W
13.56 MHz power 0 – 200 W
Electrodes The electrodes are outside of the vacuum chamber
Controls Manual
Rotary switch
Basic PC control (Windows CE)
Low Cost PC control (Windows 10 IoT)
Power Supply 230 V / 50 – 60 Hz
Pressure Measurement Optional Pirani
Vacuum Pump Capacity: approx. 3 m3/h