Low-Pressure Plasma Systems (Plasma Cleaner)
The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual, PC, and PCCE control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology
| Specifications | |
|---|---|
| Dimensions | 425 mm x 185 mm x 450 mm (W x H x D) |
| Vacuum Chamber |
Silica glass (UHP)* Ø 105 mm, depth 300 mm W6 silica glass (UHP)* Borosilicate glass (HP)* W6 borosilicate glass (HP)* RIE – Aluminium bell round with lid Rectangular chamber – lime-natron-glass *round with lid (opt. hinged door) |
| Chamber Volume | Approx. 1 – 4 litres |
| Gas Supply |
Needle valves Mass flow controllers (MFCs) |
| Generator Frequency |
40 kHz power 0 – 100 W 13.56 MHz power 0 – 200 W |
| Electrodes | The electrodes are outside of the vacuum chamber |
| Controls |
Manual Rotary switch Basic PC control (Windows CE) Low Cost PC control (Windows 10 IoT) |
| Power Supply | 230 V / 50 – 60 Hz |
| Pressure Measurement | Optional Pirani |
| Vacuum Pump | Capacity: approx. 3 m3/h |