Laboratory & Small Series System
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Zepto
Approx. 2.6 litre chamber volume
The 2.6-litre ZEPTO LOW COST PLASMA LABORATORY UNIT
with manual, PC and PCCE control.
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Application
Zepto is used in the following areas:
Small batch production
Analytics (REM, TEM)
Medical technology
Sterilisation
Research and Development departments
Archeology
Textiles
Plastics
Specifications
Basic equipment |
- The housing size varies depending on the components/options
- Chamber volumes: 1.7 – 2.6 litres, depending on the version.
- Power supply: 230 V
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Gas supply |
- Needle valve
- Mass Flow Controllers (MFCs)
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Vacuum chambers |
- Quartz glass (UHP) round with lid
(approx. ∅ 105 mm, L 200 mm or L 300 mm)
- Borosilicate glass (UHP) round with lid
(approx. ∅ 105 mm, L 200 mm or L 300 mm)
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Load |
- Product carrier: Aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
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Electrodes |
- Single, or multiple levels
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Control |
- Manual
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
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Pressure measurement |
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Timer |
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Generators |
- Frequencies:
40 kHz: Power 0 – 100 W
13.56 MHz: Power 0 – 50 W
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Vacuum pumps |
- In different sizes and from various manufacturers (as required with activated carbon filter)
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