Zepto

Laboratory & Small Series System

Zepto
Approx. 2.6 litre chamber volume

The 2.6-litre ZEPTO LOW COST PLASMA LABORATORY UNIT
with manual, PC and PCCE control.

Application

Zepto is used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilisation
  • Research and Development departments
  • Archeology
  • Textiles
  • Plastics

    • Specifications

    Basic equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 1.7 – 2.6 litres, depending on the version.
    • Power supply: 230 V
    Gas supply
    • Needle valve
    • Mass Flow Controllers (MFCs)
    Vacuum chambers
    • Quartz glass (UHP) round with lid
      (approx. ∅ 105 mm, L 200 mm or L 300 mm)
    • Borosilicate glass (UHP) round with lid
      (approx. ∅ 105 mm, L 200 mm or L 300 mm)
    Load
    • Product carrier: Aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multiple levels
    Control
    • Manual
    • PCCE control (Microsoft Windows CE)
    • PC control (Microsoft Windows POS Ready 2009)
    Pressure measurement
    • Pirani
    Timer
    • Digital
    Generators
    • Frequencies:
      40 kHz: Power 0 – 100 W
      13.56 MHz: Power 0 – 50 W
    Vacuum pumps
    • In different sizes and from various manufacturers (as required with activated carbon filter)